China's Homegrown DUV Chip Tool Named: Shanghai Aishengna
Reuters is the first to identify Shanghai Aishengna Electronic Technology Group as the state-owned firm behind China’s domestic immersion lithography push. Although their machines currently fall short of ASML's capabilities, this move represents a direct response to export controls blocking access to advanced Dutch tools.
Key Takeaways:
- Aishengna, previously little-known, is absorbing teams from top lithography startups to build immersion deep-ultraviolet (DUV) machines.
- The development comes after ASML shares plummeted over 8% on news of the Chinese effort.
- While not yet commercially viable, a successful homegrown DUV tool would provide China with an alternative source of equipment in case of further export restrictions.
Image: Canva (July 2026)
Source: Reuters (July 28, 2026)
The Information had previously reported on the unidentified Shanghai firm manufacturing these machines. This news sparked a significant drop in ASML shares.
Deep-ultraviolet lithography prints circuit patterns onto silicon using a thin layer of water between the lens and wafer to etch finer features. While not as advanced as extreme ultraviolet (EUV) technology, DUV, combined with multi-patterning, allows for the production of 7nm processors without EUV.
However, the Chinese effort is still in its testing phase, far from matching ASML's models. A source emphasizes these machines pose no immediate threat to ASML's dominance in advanced lithography.